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专利名称：Door assembly for sealing an opening of a
chamber
发明人：JEFF BLAHNIK,JOE KRAUS,DEAN C. HRUZEK申请号：AU8129301申请日：20010630公开号：AU8129301A公开日：20020121
摘要：In accordance with a first aspect, a door assembly is provided that is adapted toseal an opening of a chamber. The door assembly includes (1) a seal plate adapted toseal the opening of the chamber by moving along a first axis that is substantiallyperpendicular to the opening; (2) a central member adapted to remain stationary alongthe first axis; and (3) at least one inflatable member located between the seal plate andthe central member and adapted to inflate and move the seal plate along the first axisinto sealing engagement with the opening. Systems and methods also are provided inaccordance with this and other aspects.
申请人：APPLIED MATERIALS, INC.
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