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专利名称:Microvalve assemblies and related
structures and related methods
发明人:William O. Teach,James C. Laski,Paul W.
Gibson,Donald C. Harris,Kevin R. Douglas
申请号:US11188294申请日:20050722公开号:US07448412B2公开日:20081111
专利附图:
摘要:A valve chip may include a substrate having first and second faces and openingsbetween the first and second faces, and a plurality of flexible valve flaps on one of the
faces of the substrate with each flexible valve flap being associated with at least one ofthe openings. The valve chip may be packaged by forming a frame having an openingtherein, and securing the valve chip in the opening of the frame. More particularly, thevalve chip may be secured in the opening so that central portions of the first and secondfaces of the substrate are exposed through the opening in the frame and so that a fluidseal is provided between the frame and edges of the substrate. Related valves, valveassemblies, and methods are also discussed.
申请人:William O. Teach,James C. Laski,Paul W. Gibson,Donald C. Harris,Kevin R.Douglas
地址:Frankfort IL US,Bourbonnais IL US,Manteno IL US,Crete IL US,Lockport IL US
国籍:US,US,US,US,US
代理机构:Myers Bigel Sibley & Sajovec
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