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Microvalve assemblies and related structures and r

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专利名称:Microvalve assemblies and related

structures and related methods

发明人:William O. Teach,James C. Laski,Paul W.

Gibson,Donald C. Harris,Kevin R. Douglas

申请号:US11188294申请日:20050722公开号:US07448412B2公开日:20081111

专利附图:

摘要:A valve chip may include a substrate having first and second faces and openingsbetween the first and second faces, and a plurality of flexible valve flaps on one of the

faces of the substrate with each flexible valve flap being associated with at least one ofthe openings. The valve chip may be packaged by forming a frame having an openingtherein, and securing the valve chip in the opening of the frame. More particularly, thevalve chip may be secured in the opening so that central portions of the first and secondfaces of the substrate are exposed through the opening in the frame and so that a fluidseal is provided between the frame and edges of the substrate. Related valves, valveassemblies, and methods are also discussed.

申请人:William O. Teach,James C. Laski,Paul W. Gibson,Donald C. Harris,Kevin R.Douglas

地址:Frankfort IL US,Bourbonnais IL US,Manteno IL US,Crete IL US,Lockport IL US

国籍:US,US,US,US,US

代理机构:Myers Bigel Sibley & Sajovec

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